2009年2月4日水曜日

A Trend of MEMS Technology



A micro-3-axis-MEMS touch sensor jointly developed by Tokyo University and Panasonic received an award of "Robot of the year 2008" announced by Ministry of Economy, Trade and Industry. The MEMS chips enable robotic fingers to sense a very small amount of vertical and horizontal pressure values, as well as shearing forces of material.


2/4/09

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